Alkoxyl monolayers as anti-stiction coatings in Si-based MEMS devices-Reference-Cited by-同舟云学术

Alkoxyl monolayers as anti-stiction coatings in Si-based MEMS devices

Published:2003-01 Issue:4 Volume:17 Page:593-601
ISSN:0169-4243
Container-title:Journal of Adhesion Science and Technology
language:en
Short-container-title:Journal of Adhesion Science and Technology

Author:

Jun Yongseok,Zhu Xiaoyang

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,General Chemistry

Link

http://www.tandfonline.com/doi/pdf/10.1080/10256018808623883

Reference20 articles.

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2. Surface processes in MEMS technology

3. MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS

4. de Boer, M. P., Knapp, J. A., Redmond, J. M., Michalske, T. A. and Maboudian, R. 1998. Proceeding of the ASME IMECE Conference, Symposium on Microscale Mechanics of Materials and Structures. 1998, Anaheim, CA.

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