On the physics of stiction and its impact on the reliability of microstructures-Reference-Cited by-同舟云学术

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On the physics of stiction and its impact on the reliability of microstructures

Published:2003-01 Issue:4 Volume:17 Page:563-582
ISSN:0169-4243
Container-title:Journal of Adhesion Science and Technology
language:en
Short-container-title:Journal of Adhesion Science and Technology

Author:

Van Spengen W. Merlijn,Puers Robert,De Wolf Ingrid

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,General Chemistry

Link

http://www.tandfonline.com/doi/pdf/10.1080/10256018808623883

Reference27 articles.

1. Stiction in surface micromachining

2. Mastrangelo, C. H. and Hsu, C. H. 1992.Proc. IEEE Solid-State Sensor and Actuator Workshop, 208–212. New York: IEEE.

3. van Spengen, W. M., De Wolf, I. and Puers, B. 2000.Proc. SPIEVol. 4175, 104–112.

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