Modeling of Deformations of Photolithographic Objects
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Published:2008-01
Issue:1
Volume:4
Page:89-104
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ISSN:1573-6105
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Container-title:Multidiscipline Modeling in Materials and Structures
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language:en
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Short-container-title:Multi Modelg in Mat & Struct
Author:
Touati A.,Corbel S.,Corriou J.P.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science,Modelling and Simulation