1. a Laboratory for Integrated Micro-Mechatronic Systems (LIMMS/CNRS-IIS), Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan; Laboratoire Matière et Systèmes Complexes (MSC), Bâtiment Condorcet, Université Paris Diderot-Paris 7, 75205 Paris Cedex 13, France
2. b Laboratory for Integrated Micro-Mechatronic Systems (LIMMS/CNRS-IIS), Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan; Nikon and Essilor International Joint Research Center Co., Ltd., KSP R&D, Building C10F-1032, 3-2-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa 213-0012, Japan
3. c Institute of Industrial Science (IIS), University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
4. d Institute of Industrial Science (IIS), University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
5. e Institute of Industrial Science (IIS), University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan