1. Excimer laser update;Hecht, J.
2. Self-developing photoetching of poly (ethylene teraphthalate) films by far UV excimer laser radiation;Srinivasan, R.; Mayne-Banton, V.;Applphys lets,1982
3. Self-developing UV photoresist using excimer laser exposure;Deutsch, T.F.; Geis, M.W.;J Appl Phys,1983
4. Direct high-resolution excimer laser photoetching;Rice, S.; Jain, K.;Apple Phys,1984
5. Direct etching of polymeric materials using XeCL laser;Andrew, J.E.; Dyer, P.E.; Forster, D.; Key, P.H.;Apple Phys letts,1983