Macro to Nano Tele-Manipulation Towards Nanoelectromechanical Systems

Abstract

In this paper, manipulation systems from macro- to nanoworlds indispensable for constructing Nanoelectromechanical Systems (NEMS) are introduced, and a macro to Nanotelemanipulation System has been proposed. We selected the telerobotics manipulation for positioning micro/nanoobjects with sizes between 10nm and 10μm in 2D. A user interface enables operator to feel nanoforces using a haptic device, and see the 3D graphics of the nanoworld during manipulation. Force models, the manipulation strategy and teleoperation control are designed, and preliminary results are presented. Possible target applications of this telenanomanipulation system are nanometric particle assembly through constructing 2D or 3D NEMS devices, biological object (cell, virus, gene, DNA, etc.) manipulation, and modifying the local surface properties of materials.