Author:
Jang SungHo, ,Asai Takemi,Shimizu Yuki,Gao Wei
Abstract
In this paper, the relationship between the photodetector outputs and the three-dimensional (3D) positioning of a micro-object in an optical probe is first analyzed based on geometric optics. In the optical model established for the analysis, a collimated laser beam is focused by an objective lens to generate a small beam spot at the focal position and a thin and rectangular micro-object is set close to the focal position. The influence of diffraction of the laser beam is investigated based on a model based on wave optics.
Publisher
Fuji Technology Press Ltd.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Cited by
3 articles.
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