Author:
Yoshioka Hayato, ,Gokan Toshimichi,Shinno Hidenori,
Abstract
As the need to develop high-performance highly accurate positioning has grown in a wide range of industries, it has become necessary to comprehensively study desirable stage positioning systems based on new design concepts. Achieving nanometer positioning requires simultaneous noncontact drive and support of the moving stage. We developed a linear motordriven stage positioning system with squeeze bearings and evaluated squeeze bearing and positioning performance of the proposed positioning system through a series of actual stage driving experiments that confirmed the stage's nanopositioning capability.
Publisher
Fuji Technology Press Ltd.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Cited by
5 articles.
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