Multi-Axis Controlled Ultraprecision Machining and Measurement

Abstract

Demands of micro aspheric optical components such as lenses and mirrors are increasing for installing to the digital devices. As the devices become to be more compact and complicated, the molds shapes of lens and mirrors would become more difficult to be machined and measured. In this study, multi-axis controlled ultra precision machining/grinding and on-machine measurement technologies are developed for manufacturing of the complicated and micro molds. In this paper, the next four technologies are focused: (1) micro fresnel grinding, (2) Micro lens array grinding, (3) Ultrasonic vibration assisted polishing, and (4) Contact type of multi axis controlled on-machine measuring system.