Piezoelectric thin Film Composites with BaTiO3 for Microelectronics

Abstract

The piezocomposites from poly-(vinylidene fluoride) (PVDF) with BaTiO3 (BT) are largely presented in literature, but the composites from polydimethylsiloxane (PDMS) with BT consist a very new scientific preoccupation. The novelty of the paper lies in a new simpler route of preparation of the two composites with PDMS and respectively PVDF matrix, with tailored deposition on specific substrates for microelectronic use (e.g. indium-tin-oxide ITO/glass, Si/Pt, polyethylene terephthalate PET), along with an extensive comparation of their dielectric features, a consistent comparison of the influence of polymer matrix upon the piezoelectric features, and a demonstration of direct use for microelectronic applications of the composites of BT with PDMS. An interesting effect is observed around 100 kHz domain, determined by the activity and architecture of BT particles mainly for the BT-PDMS composites, which induce an additional ionic-dipolar conjugated polarization, as a displacement due to the balance between the resonance and anti-resonance frequency. Such phenomena explain the potential use of such composites as resonators/filters, and BT-PDMS composites should be further investigated for tailored applications in radiofrequency electronic field. We can appreciate that superior piezoelectric features are offered by the composites of BT with PDMS, comparing to the composites with PVDF, which means that the composites of BT with PDMS were worth to study, leading to more versatile variants of electronic characteristics and with superior values.