Optimization of Anchor Structure for MEMS Comb Driven Acoustic Emission Transducers Based on the Principles of Area and Gap Changes

Abstract

The focus of this article is to provide an optimized design scheme for the anchor structure of the comb capacitive acoustic emission sensor to enhance its response ability. Firstly, variable area and variable spacing sensing microelements were designed, and their basic performance parameters were obtained through finite element analysis. Using the peak response changes corresponding to the first order characteristic frequency as a reference standard, the influence of the geometric structure of the anchor section on the response was analyzed.