Research and application of digital technology of film coating equipment

Abstract

At present, most of the coating production still adopts relatively backward traditional methods, there are its equipment status, operation, production, repair and maintenance information of digital technology application less problems. In view of this problem, a data acquisition module and data processing system are developed to realize the data acquisition and real-time monitoring of the equipment temperature, vacuum degree, rotation speed, target material, film thickness and surface condition. The data acquisition module consists of a self-organized network system formed by the sensor nodes deployed in the detection area and installed on the device, combined with / wireless communication. Through the development of the system to achieve the digital and intelligent application of coating equipment.