Author:
Bai Fan,Li Meicheng,Huang Rui,Song Dandan,Jiang Bing,Li Yingfeng
Abstract
Abstract
A template-free fabrication method for silicon nanostructures, such as silicon micropillar (MP)/nanowire (NW) composite structure is presented. Utilizing an improved metal-assisted electroless etching (MAEE) of silicon in KMnO4/AgNO3/HF solution and silicon composite nanostructure of the long MPs erected in the short NWs arrays were generated on the silicon substrate. The morphology evolution of the MP/NW composite nanostructure and the role of self-growing K2SiF6 particles as the templates during the MAEE process were investigated in detail. Meanwhile, a fabrication mechanism based on the etching of silver nanoparticles (catalyzed) and the masking of K2SiF6 particles is proposed, which gives guidance for fabricating different silicon nanostructures, such as NW and MP arrays. This one-step method provides a simple and cost-effective way to fabricate silicon nanostructures.
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Reference23 articles.
1. Peng KQ, Wang X, Li L, Wu XL, Lee ST: High-performance silicon nanohole solar cells. J Am Chem Soc 2010, 132(20):6872–6873. 10.1021/ja910082y
2. Bai F, Li MC, Song DD, Yu H, Jiang B, Li YF: One-step synthesis of lightly doped porous silicon nanowires in HF/AgNO3/H2O2 solution at room temperature. Journal of Solid State Chemistry 2012. 10.1016/j.jssc.2012.07.029
3. Geng XW, Qi Z, Li MC, Duan BK, Zhao L, Bohn PW: Fabrication of antireflective layers on silicon using metal-assisted chemical etching with in situ deposition of silver nanoparticles catalysts. Solar Energy Materials & Solar Cells 2012, 103: 98–107.
4. Chan CK, Peng H, Liu G, McIlwrath K, Zhang XF, Huggins RA, Cui Y: High-performance lithium battery anodes using silicon nanowires. Nat Nanotechnology 2008, 3(1):31–35. 10.1038/nnano.2007.411
5. Bhowmick S, Alam K: Effects of source-drain underlaps on the performance of silicon nanowire on insulator transistors. Nano-Micro Lett 2010, 2(2):83–88.
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