Generating and measuring the anisotropic elastic behaviour of Co thin films with oriented surface nano-strings on micro-cantilevers
Author:
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Link
http://link.springer.com/content/pdf/10.1186/1556-276X-6-325.pdf
Reference17 articles.
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3. Badawi KF, Villain P, Goudeau Ph, Renault PO: Measuring thin film and multilayer elastic constants by coupling in situ tensile testing with x-ray diffraction. Appl Phys Lett 2002, 80: 4705–4707. 10.1063/1.1488701
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5. Chen X, Vlassak J: Numerical study on the measurement of thin film mechanical properties by means of nanoindentation. J Mater Res 2001, 16: 2974–2982. 10.1557/JMR.2001.0408
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