Author:
Dan’ko Viktor,Indutnyi Ivan,Myn’ko Victor,Lukaniuk Mariia,Shepeliavyi Petro
Abstract
Abstract
The reversible and transient photostimulated structural changes in annealed chalcogenide glass (ChG) layers were used to form interference periodic structures on semiconductor surfaces and metal films. It was shown that negative-action etchants based on amines dissolve illuminated parts of a chalcogenide film, i.e., act as positive etchants. The diffraction gratings and 2-D interference structures on germanium ChGs - more environmentally acceptable compounds than traditionally used arsenic chalcogenides - were recorded, and their characteristics were studied.
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
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