Influence of Surface Passivation on AlN Barrier Stress and Scattering Mechanism in Ultra-thin AlN/GaN Heterostructure Field-Effect Transistors

Author:

Lv Y. J.ORCID,Song X. B.,Wang Y. G.,Fang Y. L.,Feng Z. H.

Funder

National Natural Science Foundation of China

Publisher

Springer Science and Business Media LLC

Subject

Condensed Matter Physics,General Materials Science

Reference30 articles.

1. Steven CB, Kiki I, Jason AR, Walter K, Doewon P, Harry BD, Daniel DK, Alma EW, Richard LH (2001) Trapping effects and microwave power performance in AlGaN/GaN HEMTs. IEEE Electron Device Lett 48(3):465–471

2. Shih HY, Chu FC, Das A, Lee CY, Chen MJ, Lin RM (2016) Atomic layer deposition of gallium oxide films as gate dielectrics in AlGaN/GaN metal–oxide–semiconductor high-electron-mobility transistors. Nanoscale Res Lett 11:235

3. Li SB, Ware ME, Wu J, Kunets VP, Hawkridge M, Minor P, Wang ZM, Wu ZM, Jiang YD, Salamo GJ (2012) Polarization doping: reservoir effects of the substrate in AlGaN graded layers. J Appl Phys 112(5):035711-1-035711-5

4. Li SB, Zhang T, Wu J, Yang YJ, Wang ZM, Wu ZM, Chen Z, Jiang YD (2013) Polarization induced hole doping in graded AlxGa1-x(X=0.7~1) layer grown by molecular beam epitaxy. Appl Phys Lett 102(6):062108-1-62108-3

5. Li SB, Ware M, Wu J, Minor P, Wang ZM, Wu ZM, Jiang YD, Salamo GJ (2012) Polarization induced pn-junction without dopant in graded AlGaN coherently strained on GaN. Appl Phys Lett 101(12):122103-1-122103-3

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