Author:
Yang Weihuang,Mu Yuanbin,Chen Xiangshuo,Jin Ningjing,Song Jiahao,Chen Jiajun,Dong Linxi,Liu Chaoran,Xuan Weipeng,Zhou Changjie,Cong Chunxiao,Shang Jingzhi,He Silin,Wang Gaofeng,Li Jing
Abstract
AbstractLarge-area, continuous monolayer WS2 exhibits great potential for future micro-nanodevice applications due to its special electrical properties and mechanical flexibility. In this work, the front opening quartz boat is used to increase the amount of sulfur (S) vapor under the sapphire substrate, which is critical for achieving large-area films during the chemical vapor deposition processes. COMSOL simulations reveal that the front opening quartz boat will significantly introduce gas distribute under the sapphire substrate. Moreover, the gas velocity and height of substrate away from the tube bottom will also affect the substrate temperature. By carefully optimizing the gas velocity, temperature, and height of substrate away from the tube bottom, a large-scale continues monolayered WS2 film was achieved. Field-effect transistor based on the as-grown monolayer WS2 showed a mobility of 3.76 cm2V−1 s−1 and ON/OFF ratio of 106. In addition, a flexible WS2/PEN strain sensor with a gauge factor of 306 was fabricated, showing great potential for applications in wearable biosensors, health monitoring, and human–computer interaction.
Funder
Zhejiang Provincial Natural Science Foundation of China
National Natural Science Foundation of China
Foundation from Key project of Hangzhou Polytechnic of Science and Technology
Talent Project of Zhejiang Province
Key Research and Development Plan Project of Zhejiang Province
Foundation from Department of Science and Technology of Fujian Province
Scientific Research Foundation from Jimei University
National Key R&D Program of China
Shanghai Municipal Natural Science Foundation
Publisher
Springer Science and Business Media LLC
Cited by
3 articles.
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