The dynamics of electron beam scattering on metal membranes: nanopore formation in metal membranes using transmission electron microscopy-Reference-Cited by-同舟云学术

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The dynamics of electron beam scattering on metal membranes: nanopore formation in metal membranes using transmission electron microscopy

Published:2018-11-12 Issue:1 Volume:5 Page:
ISSN:2196-5404
Container-title:Nano Convergence
language:en
Short-container-title:Nano Convergence

Author:

Kim Hyun-Mi,Park Kyeong-Beom,Kim Hyung-Jun,Chae Hongsik,Yu Jae-Seok,Lee Kidan,Kim Ki-Bum

Funder

National Research Foundation of Korea

Ministry of Science and ICT

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1186/s40580-018-0164-z.pdf

Reference24 articles.

1. A.J. Storm, J.H. Chen, X.S. Ling, H.W. Zandbergen, C. Dekker, Fabrication of solid-state nanopores with single-nanometre precision. Nat. Mater. 2(8), 537–540 (2003)

2. S.D. Berger, I.G. Salisbury, R.H. Milne, D. Imeson, C.J. Humphreys, Electron energy-loss spectroscopy studies of nanometer-scale structures in alumina produced by intense electron-beam irradiation. Philos. Mag. B 55(3), 341–358 (1987)

3. D. Williams, C.B. Carter, Transmission electron microscopy (Springer, US, 1996), p. 65

4. H.-M. Kim, M.H. Lee, H.-S. Lee, J.-S. Wi, K. Lim, K.-B. Kim, Method of improving the quality of nanopatterning in atomic image projection electron-beam lithography. J. Vac. Sci. Technol. B 27(6), 2553–2557 (2009)

5. H.M. Kim, M.H. Lee, K.B. Kim, Theoretical and experimental study of nanopore drilling by a focused electron beam in transmission electron microscopy. Nanotechnology 22(27), 275303 (2011)

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