Effects of Carbon Contaminations on Electron-Induced Damage of SiO<sub>2</sub> Film Surface at Different Electron Primary Energies-Reference-Cited by-同舟云学术

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Effects of Carbon Contaminations on Electron-Induced Damage of SiO₂ Film Surface at Different Electron Primary Energies

Published:2011 Issue:1 Volume:18 Page:26-35
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Nagatomi T.¹,Nakamura H.¹,Takai Y.¹,Ogiwara T.²,Kimura T.²,Tanuma S.²

Affiliation:

1. Department of Material and Life Science, Graduate School of Engineering, Osaka University

2. Materials Analysis Station, National Institute for Materials Science

Publisher

Surface Analysis Society of Japan

Link

https://www.jstage.jst.go.jp/article/jsa/18/1/18_26/_pdf

Reference15 articles.

1. [1] S. Ichimura and R. Shimizu, J. Appl. Phys. 50, 6020 (1979).

2. [2] H. Nonaka, S. Ichimura, and K. Arai, Surf. Interface Anal. 16, 435 (1990).

3. [3] J. Fujiwara, K. Yoshihara, and K. Nii, J. Surf. Sci. Soc. Jpn. 8, 148 (1987) (in Japanese).

4. [4] K. Min, M. Nakamura, and K. Yoshihara, J. Surf. Anal. 3, 39 (1997) (in Japanese).

5. [5] C. G. Pantano and T. E. Madey, Appl. Suf. Sci. 7, 115 (1981).

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3. Approach to Quantitative Evaluation of Electron-Induced Degradation of SiO2 Film Surface with Different Amounts of Carbon Contaminations;e-Journal of Surface Science and Nanotechnology;2011

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