Development of Secondary Ion Optical System to Achieve Three-Dimensional Shave-off SIMS-Reference-Cited by-同舟云学术

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Development of Secondary Ion Optical System to Achieve Three-Dimensional Shave-off SIMS

Published:2019 Issue:3 Volume:25 Page:172-180
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Matsumura Kohei¹,Kang So-Hee¹,Tomiyasu Bunbunoshin²,Owari Masanori¹²

Affiliation:

1. Institute of Industrial Science, The University Tokyo

2. Environmental Science Center, The University of Tokyo

Publisher

Surface Analysis Society of Japan

Link

https://www.jstage.jst.go.jp/article/jsa/25/3/25_172/_pdf

Reference9 articles.

1. [ 1] H. Satoh, M. Owari and Y. Nihei, J. Vac. Sci. Technol. B 6, 915 (1988).

2. [ 2] M. Fujii, K. Nakamura, Y. Ishizaki, M. Nojima, M. Owari and Y. Nihei, Appl. Surf. Sci. 255, 1354 (2008).

3. [ 3] M. Nojima, A. Maekawa, T. Yamamoto, B. Tomiyasu, T. Sakamoto, M. Owari and Y. Nihei, Appl. Surf. Sci. 252, 7293 (2006).

4. [ 4] D. Shirakura, B. Tomiyasu and M. Owari, e-J. Surf. Sci. Nanotech. 14, 179 (2016).

5. [ 5] A. Habib, H. Asakura, M. Fukushima, S.-H. Kang, Y. Kim, B. Tomiyasu and M. Owari, J. Surf. Anal. 24, 159 (2017).

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