Measurement of Sputtering Rate Using the Mesh-replica Method with Reference to ISO/TR 22335-Reference-Cited by-同舟云学术

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Measurement of Sputtering Rate Using the Mesh-replica Method with Reference to ISO/TR 22335

Published:2022 Issue:3 Volume:28 Page:179-196
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Okumura Hiroshi¹

Affiliation:

1. Mitsubishi Materials Corporation

Publisher

Surface Analysis Society of Japan

Subject

General Medicine

Link

https://www.jstage.jst.go.jp/article/jsa/28/3/28_179/_pdf

Reference12 articles.

1. [ 1] ISO/TR 22335:2007　Surface chemical analysis—Depth profiling—Measurement f sputtering rate: mesh—replica method using a mechanical stylus profilometer —

2. [ 2] M. Suzuki, M. Mogi, H. Ando, J. Surf. Anal. 5, 188 (1999).

3. [ 3] 鈴木峰晴, 表面科学　24, 222 (2003).

4. [ 4] R. Shin-ya, M. Inoue, SERD project of SASJ, J. Surf. Anal. 13, 2 (2006).

5. [ 5] SERD project, J. Surf. Anal. 8, 76 (2001).

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