1. [1] for example, S. Hofmann, Surf. Interface Anal. 9, 3 (1986).
2. [2] H. J. Mathieu, Chapter 3 in Thin Film and Depth Profile Analysis, Springer-Verlang, ed. by H. Oechsner (1984).
3. [3] ISO14606: 2000 Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials.
4. [4] G. D. Ingram and M. P. Seah, J. Phys. E: Sci. Instrum. 22, 242 (1989).
5. [5] M. Inoue, K. Kurahashi, and K. Kodama, J. Surf. Anal. 10, 3, 197 (2003) (in Japanese).