Recent Progress of Cluster Ion Beam Technology And Its Application for Surface Analysis

Author:

Sanada N.1

Affiliation:

1. ULVAC-PHI, Inc.

Publisher

Surface Analysis Society of Japan

Reference69 articles.

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5. [8] H. L. Bay, H. H. Andersen, W. O. Hofer, and O. Nilsen, Nucl. Instrum. Meth. Phys. Res., 132, 301 (1976).

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