Evaluation of Focused Ion Beam for Shave-off Depth Profiling-Reference-Cited by-同舟云学术

Evaluation of Focused Ion Beam for Shave-off Depth Profiling

Published:2011 Issue:3 Volume:17 Page:232-236
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Fujii M.¹,Imamura T.¹,Nojima M.²,Owari M.¹³

Affiliation:

1. IIS, The University of Tokyo

2. RIST, Tokyo University of Science

3. ESC, The University of Tokyo

Publisher

Surface Analysis Society of Japan

Link

https://www.jstage.jst.go.jp/article/jsa/17/3/17_232/_pdf

Reference6 articles.

1. [1] M. Toi, A. Maekawa, T. Yamamoto, B. Tomiyasu, T. Sakamoto, M. Owari, M. Nojima and Y. Nihei, J. Surf. Anal., 12, 170 (2005).

2. [2] W. Ward, R. L. Kubena, M. W. Utlaut, J. Vac. Sci. Technol., B6, 2090 (1988).

3. [3] K. Nakamura, Y. Ishikawa, K. Utsumi, H. Igusa, R. Tanaka, Y. Ishizaki, T. Yamamoto, A. Maekawa, M. Owari, M. Nojima and Y. Nihei, Surf. Interf. Anal. 38, 1734 (2006).

4. [4] M. Fujii, K. Nakamura, Y. Ishizaki, M. Nojima, M. Owari and Y. Nihei, Applied Surface Science, 255, 1354, (2008).

5. [5] M. Fujii, M. Nojima, M. Owari and Y. Nihei, e-Journal of Surface and Nanotechnology, 8, 247 (2010).

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