Resonance Micro-Weighing of Sub-Picogram Mass with the Use of Adaptive Interferometer

Author:

Romashko Roman1,Efimov Timofey2,Kulchin Yuri3

Affiliation:

1. Institute of Automation and Control Processes FEB RAS, Lab. of Precision Optical Measurement Techniques, Radio st. 5, 690041 Vladivostok, Russia / School of Natural Sciences, Far-Eastern Federal University, Suhanova st. 8, 690091 Vladivostok, Russia

2. Institute of Automation and Control Processes FEB RAS, Lab. of Precision Optical Measurement Techniques, Radio st. 5, 690041 Vladivostok, Russia

3. Institute of Automation and Control Processes FEB RAS, Lab. of Precision Optical Measurement Techniques, Radio st. 5, 690041 Vladivostok, Russia, / School of Natural Sciences, Far-Eastern Federal University, Suhanova st. 8, 690091 Vladivostok, Russia,

Abstract

Abstract Mass of macroscopic object is easily measured by a suitable balance. However, this approach becomes inapplicable if mass of microscopic object is to be determined. Alternative approach for mass measurement is based on using the micromechanical resonator as an inertial balance where oscillation frequency is shifted by small quantities of adsorbed mass. In this work we present experimental results of applying an adaptive interferometry technique based on dynamic hologram recorded in photorefractive CdTe crystal for measuring picogram mass adsorbed on micromechanical resonators with dimensions 215×40×15 μm3. It is also shown that the resonance micro-weighing system based on adaptive interferometer has potential for reducing the threshold of mass detection down to 10-17 g in the case of using a resonator with sub-micron dimensions

Publisher

Walter de Gruyter GmbH

Subject

Instrumentation,Biomedical Engineering,Control and Systems Engineering

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Micro-Weighing Based Biosensor with Adaptive Interferometry;IECB 2023;2023-05-08

2. Embedded measurement system in mechatronic capacitive balance based on ceramic coil springs;2022 International Conference on Electrical, Computer, Communications and Mechatronics Engineering (ICECCME);2022-11-16

3. An AlN Micromachined Mass Sensor: Modeling and Characterization;IEEE Transactions on Instrumentation and Measurement;2021

4. Calculation of Resonant Oscillations of a Micromechanical oscillator with an Attached Mass;Bulletin of the Lebedev Physics Institute;2020-08

5. Calculation of Resonant Frequencies of Silicon AFM Cantilevers;Journal of Physics: Conference Series;2020-01-01

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