Optical properties of AlN layers obtained by magnetron sputtering-Reference-Cited by-同舟云学术

Optical properties of AlN layers obtained by magnetron sputtering

Published:2018-12-01 Issue:4 Volume:36 Page:717-721
ISSN:2083-134X
Container-title:Materials Science-Poland
language:en
Short-container-title:

Author:

Potera Piotr¹,Wisz Grzegorz¹,Szyller Łukasz¹

Affiliation:

1. Faculty of Mathematics and Natural Sciences , University of Rzeszow , Rzeszow , Poland

Abstract

Abstract The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N2 content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values.

Publisher

Walter de Gruyter GmbH

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.sciendo.com/pdf/10.2478/msp-2018-0087

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