Author:
Chugui Yu.,Verkhoglyad A.,Poleshchuk A.,Korolkov V.,Sysoev E.,Zavyalov P.
Abstract
Abstract
Modern industry and science require novel 3D optical measuring systems and laser technologies with micro/nanometer resolution for solving actual problems. Such systems, including the 3D dimensional inspection of ceramic parts for electrotechnical industry, laser inspection of wheel pair diagnostic for running trains and 3D superresolution low-coherent micro- /nanoprofilometers are presented. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are given. The measuring systems and the laser image generator developed and produced by TDI SIE and IAE SB RAS have been tested by customers and used in different branches of industry and science.
Subject
Instrumentation,Biomedical Engineering,Control and Systems Engineering
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献