Numerical analysis of absorption and transmission photoacoustic spectra of silicon samples with differently treated surfaces

Abstract

AbstractThis paper presents results of the photoacoustic (PA) spectral studies, of a series of silicon samples with differently prepared surfaces, in two PA experimental configurations, so-called, absorption and transmission ones. The PA amplitude spectra of the samples indicated existence of the damaged surface layers. In the paper, the two layer mathematical models of a sample with a damaged surface layer that were used for numerical interpretation of the amplitude PA spectra of the investigated samples, are presented and discussed.