1. Understanding lithography technology;Neureuther,1993
2. Optical proximity correction: a first look at manufacturability;Liebmann;Proc. SPIE,1994
3. Improving resolution in photolithography with a phase-shifting mask;Levenson;IEEE Trans. Electron Devices,1982
4. If it moves, simulate it!;Neureuther;Proc. SPIE,2008
5. Resolution Enhancement Techniques in Optical Lithography;Wong,2001