Author:
Lebedev Yu. A.,Krashevskaya G. V.,Titov A. Yu.,Epstein I. L.
Subject
General Engineering,Condensed Matter Physics
Reference31 articles.
1. Samukawa, S., et al., J. Phys. D: Appl. Phys., 2012, vol. 45, 253001.
2. Bruggeman, P.J., et al., Plasma Sources Sci. Technol., 2016, vol. 25, 053002.
3. Heintz, R.J., Appl. Phys., 1968, vol. 39, p. 1741.
4. Suzuki, K., Okudira, S., Sakudo, N., and Kanomata, I., Jpn. J. Appl. Phys., 1977, vol. 16, p. 1979.
5. Bardos, L., Dragila, R., Lonear, G., and Musil, J., Rozpr. Cesk. Akad. Ved,Rada Tech. Ved, 1983, vol. 93, p. 86.