Specifics of Damageability of the Silicon Single Crystal under Exposure of Powerful Plasma Streams and Fast Helium Ions

Author:

Gribkov V. A.,Demin A. S.,Demina E. V.,Epifanov N. A.,Latyshev S. V.,Lyakhovitsky M. M.,Maslayev S. A.,Morozov E. V.,Pimenov V. N.,Sasinovskaya I. P.,Sirotinkin V. P.,Sprygin G. S.,Timoshina M. I.

Publisher

Pleiades Publishing Ltd

Subject

General Engineering,General Materials Science

Reference31 articles.

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2. Reutov, V.F. and Sokhatskii, A.S., Helium ion bombardment induced amorphization of silicon crystals, Tech. Phys. Lett., 2002, vol. 28, no. 7, pp. 615–617.

3. Reutov, V.F. and Sokhatskii, A.S. Formation of ordered helium pores in amorphous silicon subjected to lowenergy helium ion irradiation, Tech. Phys., 2003, vol. 48, no. 1, pp. 68–72.

4. Jia, Z.-C., Li, Z.-W., Zhou, J., and Ni, X.-W., Slip on the surface of silicon wafers under laser irradiation: scale effect, Chin. Phys. B, 2017, vol. 26, no. 11, p. 116102. https://doi.org/10.1088/1674-1056/26/11/116102

5. Dolgolenko, A.P., Gaidar, G.P., Varentsov, M.D., and Litovchenko, P.G., The radiation hardness of n- and p‑Si, doped by oxygen and germanium, under the irradiation by high-energy nuclear particles, Vopr. At. Nauki Tekh., Ser.: Fiz. Radiats. Povrezhdenii Radiats. Materialoved., 2008, no. 2, pp. 151–157.

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