Technology of latent image writing in chromium films in application to synthesizing precision angle measuring structures

Author:

Kiryanov A. V.,Nikitin V. G.

Publisher

Pleiades Publishing Ltd

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference14 articles.

1. V. M. Vedernikov, V. P. Kiryanov, V. P. Korolkov, et al., “Laser Technology for Fabricating Circular Scales and Encoders,” Preprint No. 329 (Inst. of Automation and Electrometry, Sib. Branch, USSR Acad. of Sc., Novosibirsk, 1986).

2. Dr. Johannes Heidenhain GmbH General Catalog (Traunreut, Germany, 1982).

3. G. Shuhardt, “New Instrument Complex for Production of High-Precision Angular Scales,” Jena’s Review, No. 2, 92 (1986).

4. L. N. Presnukhin, S. A. Maiorov, I. V. Mes’kin, and V. F. Shan’gin, Photoelectric Information Encoders, Ed. by L. N. Presnukhin (Mashinostroenie, Moscow, 1974) [in Russian].

5. V. B. Topil’skii and K. K. Kondrashov, “Automated Photomechanical Dividing Machine,” in Scientific and Technical Progress: Interindustry Scientific and Technical Collected Articles (VIMI, Moscow, 1995), No. 2, p. 37.

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