Author:
Kazanskiy N. L.,Kolpakov V. A.,Krichevskiy S. V.,Podlipnov V. V.
Subject
Physics and Astronomy (miscellaneous)
Reference47 articles.
1. R. C. Jaeger, Film Deposition: Introduction to Microelectronic Fabrication, 2nd ed. (Prentice Hall, Upper Saddle River, NJ, 2002).
2. J. S. Aldridge, A. N. Cleland, R. Knobel, D. R. Schmidt, and C. S. Yung, Proc. SPIE 4591, 11 (2001).
3. Z. R. Dai, Z. W. Pan, and Z. L. Wang, Adv. Funct. Mater. 13, 9 (2003).
4. Diffractive Nanophotonics, Ed. by V. A. Soifer (Taylor and Francis, London, 2014).
5. S. Amirhaghi, V. Craciun, D. Craciun, J. Elders, and I. W. Boyd, Microelectron. Eng. 25, 321 (1994).
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献