Author:
Sharma N.,Chakraborty M.,Borthakur S.,Neog N. K.,Bandyopadhyay M.
Subject
Physics and Astronomy (miscellaneous),Condensed Matter Physics
Reference43 articles.
1. K. P. Shamrai, V. P. Pavlenko, and V. B. Taranov, Plasma Phys. Control. Fusion 39, 505 (1997).
2. M. Yano and M. L. R. Walker, Phys. Plasmas 13, 063501 (2006).
3. P P. Chabert and N. Braithwaite, Physics of Radio-Frequency Plasmas (Cambridge Univ. Press, Cambridge, 2011).
4. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
5. A. J. Perry, D. Vender, and R. W. Boswell, J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.−Process., Meas., Phenom. 9, 310 (1991).
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献