Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures-Reference-Cited by-同舟云学术

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Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures

Published:2009-10 Issue:10 Volume:35 Page:883-889
ISSN:1063-780X
Container-title:Plasma Physics Reports
language:en
Short-container-title:Plasma Phys. Rep.

Author:

Tsiolko V. V.,Bazhenov V. Yu.,Shchedrin A. I.,Kalyuzhnaya A. G.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous),Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1134/S1063780X09100110.pdf

Reference25 articles.

1. G. L. Bragila and L. Ferrari, Nuovo Cimento 4, 245 (1971).

2. J. M. Warman, V. Sowada, and M. P. De Haas, Phys. Rev. A 31, 1974 (1975).

3. A. V. Rokhlenko, Zh. Éksp. Teor. Fiz. 75, 1315 (1978) [Sov. Phys. JETP 48, 663 (1978)].

4. N. A. Dyatko, I. V. Kochetov, and A. P. Napartovich, Pis’ma Zh. Tekh. Fiz. 13, 1457 (1987) [Sov. Tech. Phys. Lett. 13, 610 (1987)].

5. P. M. Golovinskii and A. I. Shchedrin, Zh. Tekh. Fiz. 59(2), 51 (1989) [Sov. Phys. Tech. Phys. 34, 159 (1989)].

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1. Study of SF6and SF6/O2plasmas in a hollow cathode reactive ion etching reactor using Langmuir probe and optical emission spectroscopy techniques;Plasma Sources Science and Technology;2010-03-08

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