1. Surface Modification and Alloying by Laser, Ion, and Electron Beams, Ed. by J. M. Poate, G. Foti, and D. C. Jacobson (Springer, New York, 2013).
2. R. M. Rogov, V. I. Nuzhdin, V. F. Valeev, A. L. Stepanov, A. L. Gumarov, L. R. Tagirov, and I. M. Klimovich, Vacuum 166, 84 (2019).
3. Ion Implantation and Beam Processing, Ed. by J. S. Williams and J. M. Poate (Academic, New York, 2014).
4. J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and Ngoc C. Tran, J. Appl. Phys. 62, 4591 (1987).
5. Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. by A. Anders (Wiley, New York, 2000).