Automated diagnostics of a magnetron discharge plasma based on atomic molecular emission spectra-Reference-Cited by-同舟云学术

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Automated diagnostics of a magnetron discharge plasma based on atomic molecular emission spectra

Published:2012-12 Issue:13 Volume:38 Page:1099-1104
ISSN:1063-780X
Container-title:Plasma Physics Reports
language:en
Short-container-title:Plasma Phys. Rep.

Author:

Gradov V. M.,Zimin A. M.,Krivitskiy S. E.,Serushkin S. V.,Troynov V. I.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous),Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1134/S1063780X12110025.pdf

Reference17 articles.

1. B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982) [in Russian].

2. P. V. Kashtanov, B. M. Smirnov, and R. Hippler, Phys. Usp. 50, 455 (2007).

3. N. G. Elistratov, A. M. Zimin, N. N. Vasil’ev, et al., Vopr. At. Nauki Tekh., Ser. Termoyad. Sintez, No. 1, 34 (2005).

4. A. V. Rogov and K. Yu. Vukolov, Vopr. At. Nauki Tekh., Ser. Termoyad. Sintez, No. 1, 9 (2005).

5. Z. Shi, T. Holbrook, K. Denghan, et al., Appl. Spectrosc. 46, 749 (1992).

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