Accumulation of products of ferroelectric target sputtering in the plasma of an RF glow discharge-Reference-Cited by-同舟云学术

Accumulation of products of ferroelectric target sputtering in the plasma of an RF glow discharge

Published:2013-12 Issue:13 Volume:39 Page:1096-1098
ISSN:1063-780X
Container-title:Plasma Physics Reports
language:en
Short-container-title:Plasma Phys. Rep.

Author:

Zinchenko S. P.,Tolmachev G. N.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous),Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1134/S1063780X13050176.pdf

Reference13 articles.

1. V. M. Mukhortov, Yu. I. Golovko, A. A. Mamatov, et al., in Proceedings of the Southern Scientific Center, Russian Academy of Sciences (YuNTs RAN, Rostov-on-Don, 2007), Vol. 2, p. 224 [in Russian].

2. V. M. Mukhortov, G. N. Tolmachev, and Yu. I. Golovko, Vest. Yuzh. Nauch. Tsentra RAN 2(1), 30 (2006).

3. V. M. Mukhortov, Yu. I. Golovko, and A. I. Mashchenko, Zh. Tekh. Fiz. 68(9), 96 (1998).

4. V. M. Mukhortov, G. N. Tolmachev, and A. I. Mashchenko, Tech. Phys. 38, 1001 (1993).

5. V. M. Mukhortov, Yu. I. Golovko, G. N. Tolmachev, and A. I. Mashchenko, Tech. Phys. 44, 1477 (1999).

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