Author:
Andreev V. V.,Voldiner I. A.,Korneeva M. A.
Subject
Physics and Astronomy (miscellaneous),Condensed Matter Physics
Reference7 articles.
1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. V. V. Andreev, I. Vasileska, and M. A. Korneeva, Prikl. Fiz., No. 2, 69 (2015).
3. R. Kiriyama, T. Takenaka, Y. Kurisu, D. Nozaki, F. Sato, Y. Kato, and T. Lida, Rev. Sci. Instrum. 83, 02A324 (2012).
4. N. Sakudo, Rev. Sci. Instrum. 71, 762 (1977).
5. S. Gammino, L. Celola, G. Giavola, F. Maimone, and D. Mascali, Rev. Sci. Instrum. 81, 02B313 (2010).