Features of simultaneous diffusion of boron and gadolinium in silicon from nanoscale hybrid organic-inorganic films-Reference-Cited by-同舟云学术

Features of simultaneous diffusion of boron and gadolinium in silicon from nanoscale hybrid organic-inorganic films

Published:2009-10 Issue:10 Volume:43 Page:1394-1399
ISSN:1063-7826
Container-title:Semiconductors
language:en
Short-container-title:Semiconductors

Author:

Smirnova I. V.,Shilova O. A.,Moshnikov V. A.,Gamarts A. E.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1134/S1063782609100248.pdf

Reference27 articles.

1. Z. Yu. Gotra, Technology of Microelectronic Devices, Handbook (Radio Svyaz’, Moscow, 1991) [in Russian].

2. V. V. Novikov, Theoretical Bases of Microelectronics, the Schoolbook (Vyssh. Shkola, Moscow, 1972) [in Russian].

3. A. I. Borisenko, V. V. Novikov, N. E. Prikhod’ko, I. M. Mitnikova, and L. F. Chepik, Thin Inorganic Films in Microelectronics (Nauka, Leningrad, 1972) [in Russian].

4. O. V. Aleksandrov, A. O. Zakhar’in, and N. A. Sobolev, Fiz. Tekh. Poluprovodn. 39, 776 (2005) [Semiconductors 39, 742 (2005)].

5. V. G. Lifshits, Soros. Obraz. Zh., No. 2, 107 (1997).

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