Effect of Plasma-Chemical Surface Modification on the Electron Transport and Work Function in Silicon Crystals

Author:

Yafarov R. K.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. V. L. Bonch-Bruevich, and S. G. Kalashnikov, Physics of Semiconductors (Nauka, Moscow, 1977) [in Russian].

2. K. Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov, and M. Katayama, Surface Science: An Introduction (Springer, New York, 2003; Nauka, Moscow, 2006).

3. R. K. Yafarov, Nanotechnology Microwave Vacuum-Plasma Equipments (Fizmatlit, Moscow, 2009) [in Russian].

4. R. K. Yafarov and V. Ya. Shanygin, Semiconductors 51, 531 (2017).

5. D. V. Budko and R. K. Yafarov, in Proceedings of the 6th All-Russia Conference of Young Scientists on Nanoelectronics, Nanophotonics and Nonlinear Physics, Saratov, Russia, 2011, p. 13.

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