On the nature of cracks using single-crystalline silicon subjected to anodic etching as an example-Reference-Cited by-同舟云学术

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On the nature of cracks using single-crystalline silicon subjected to anodic etching as an example

Published:2014-08 Issue:8 Volume:48 Page:1088-1093
ISSN:1063-7826
Container-title:Semiconductors
language:en
Short-container-title:Semiconductors

Author:

Gerasimenko N. N.,Tynyshtykbaev K. B.,Starkov V. V.,Medetov N. A.,Tokmoldin S. Zh.,Gosteva E. A.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1134/S1063782614080120.pdf

Reference29 articles.

1. V. V. Starkov, Vse Mater. Entsikloped. Sprav., No. 4, 13 (2009).

2. M. D. Mason, D. J. Sirbuly, and S. K. Buratto, Thin Solid Films 406, 151 (2002).

3. K. B. Tynyshtykbaev, Yu. A. Ryabikin, K. A. Mit’, B. A. Rakymetov, and T. Aitmukan, Phys. Solid State 53, 1575 (2011).

4. V. V. Starkov, V. M. Tseitlin, I. Konli, Kh. Presting, U. Kenig, and A. F. Vyatkin, Mikrosist. Tekh., No. 7, 35 (2001).

5. V. V. Starkov, E. A. Starostina, I. Konli, Kh. Presting, U. Kenig, and A. F. Vyatkin, Mikrosist. Tekh., No. 8, 34 (2001).

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