Author:
Ganzherli N. M.,Gulyaev S. N.,Maurer I. A.,Khazvalieva D. R.
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. S. N. Gulyaev and V. P. Ratushnyi, J. Opt. Technol. 70, 105 (2003). doi 10.1364/JOT.70.000105
2. N. M. Ganzherli, S. N. Gulyaev, and I. A. Maurer, Tech. Phys. Lett. 42, 988 (2016). doi 10.1134/S1063785016100060
3. N. M. Ganzherli, S. N. Gulyaev, and I. A. Maurer, J. Opt. Technol. 84, 617 (2017).
4. M. A. McCord and M. J. Rooks, Handbook of Microlithography, Micromachining and Microfabrication, Ed. by P. Rai-Choudhury, Vol. 1: Microlithography (SPIE Optical Engineering, Bellingham, Washington, 1997), p. 139. doi 10.1117/3.2265070
5. W. M. Moreau, Semiconductor Lithography Principles: Practices and Materials (Plenum, New York, 1988).
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