Diagnostics of plasma processes in micro- and nanoelectronics-Reference-Cited by-同舟云学术

Diagnostics of plasma processes in micro- and nanoelectronics

Published:2009-05 Issue:3 Volume:43 Page:196-203
ISSN:0018-1439
Container-title:High Energy Chemistry
language:en
Short-container-title:High Energy Chem

Author:

Rudenko K. V.

Publisher

Pleiades Publishing Ltd

Subject

Physical and Theoretical Chemistry

Link

http://link.springer.com/content/pdf/10.1134/S0018143909030072.pdf

Reference17 articles.

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3. Entsiklopediya nizkotemperaturnoi plazmy (Encyclopedia of Low-Temperature Plasma), Lebedev, Yu.A., Plate, N.A., and Fortov, V.E., Eds., Moscow: Yanus-K, 2006, vol. XII-5, p. 381.

4. Orlikovsky, A.A., Mikroelektronika, 1999, vol. 28, no. 6, p. 415.

5. Liberman, M.A. and Lichtenberg, A.J., Principles of Plasma Discharges and Materials Processing, Hoboken: Wiley, 2005.

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