1. M. Moisan, J. Margot, Z. Zakrewski, and A. Popov, High-Density Plasma Sources (Noyes, New Jersey, 1995).
2. E. Rauchle, J. Phys. IV (France) 8, Pr7-99 (1998).
3. M. Moisan, G. Sauve, Z. Zakrzewski, and J. Hubert, Plasma Sources Sci. Technol. 3, 584 (1994).
4. Y. Mitsuda, T. Yoshida, and K. Akashi, Rev. Sci. Instrum. 60, 249 (1989).
5. S. I. Gritsinin, I. A. Kossyi, N. I. Malykh, et al., in Proceedings of the 14th International Symposium on Plasma Chemistry, Prague, 1999, Vol. 2, p. 675.