1. S. R. Wilson, C. J. Tracy, and J. L. Freeman, Jr., Handbook of Multilevel Metallization for IC (Noyes Publications, 1994).
2. R. Doering and Y. Nishi, Handbook of Semiconductor Manufacturing Technology (Taylor&Francis Group, 2008).
3. H. G. Tompkins and E.A. Irene, Ellipsometry and Polarized Light (William Andrew, Inc., 2005).
4. R. M. Feshchenko, I. V. Pirshin, A. G. Touryanski, and A. V. Vinogradov, J. Russian Laser Res. 20(2), 136 (1999).
5. S. A. Aprelov, V. M. Senkov, N. N. Gerasimenko, et al., Izv. Vuzov. Electron., No. 5, 27 (2006).