Author:
Rudakov V. I.,Denisenko Yu. I.,Naumov V. V.,Simakin S. G.
Subject
Physics and Astronomy (miscellaneous)
Reference10 articles.
1. B. Li and J. Liu, J. Appl. Phys. 105, 084 905 (2009).
2. S. Murarka, Silicides for VLSI Applications (Academic Press, New York, 1983; Mir, Moscow, 1986).
3. R. A. Donaton, K. Maex, A. Vantomme, et al., Appl. Phys. Lett. 70, 1266 (1997).
4. C. Detavernier, C. Lavoie, and R. L. van Meirhaeghe, Thin Solid Films 468, 174 (2004).
5. V. I. Rudakov and V. N. Gusev, Mikroelektronika 37(4), 245 (2008) [Russ. Microelectron. 37 (4), 215 (2008)].
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