Features of electrostimulated degradation of aluminum metallization on silicon surface in the presence of dielectric steps-Reference-Cited by-同舟云学术

Features of electrostimulated degradation of aluminum metallization on silicon surface in the presence of dielectric steps

Author:

Skvortsov A. A.,Rybin V. V.,Zuev S. M.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

Reference7 articles.

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4. A. A. Skvortsov, A. M. Orlov, and A. A. Salanov, Pis’ma Zh. Tekh. Fiz. 27(19), 76 (2001) [Tech. Phys. Lett. 27, 834 (2001)].

5. A. M. Orlov, A. V. Pirogov, and T. G. Emel’yanova, Neorg. Mater. 29, 1559 (1993).

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