Thermodynamic Analysis of Preparation of SiBCN Films Using a Trimethylaminoborane–Tetramethyldisilazane Gas Mixture
Author:
Publisher
Pleiades Publishing Ltd
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry,Materials Science (miscellaneous)
Link
https://link.springer.com/content/pdf/10.1134/S0036023621110152.pdf
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