1. Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. by A. Anders (Wiley, New York, 2000).
2. A. V. Phelps, J. Phys. Chem. Ref. Data 20, 557 (1991).
3. D. Vempaire, J. Pelletier, A. Lacoste, S. Bechu, et al., Plasma Phys. Controlled Fusion 47, A153 (2005).
4. A. S. Metel, S. N. Grigoriev, Yu. A. Mel’nik, and V. V. Panin, Fiz. Plazmy 35, 1140 (2009) [Plasma Phys. Rep. 35, 1058 (2009)].
5. A. S. Metel and S. N. Grigoriev, Glow Discharge with Electrostatic Electron Confinement (Yanus-K, Moscow, 2005) [in Russian].